An Experimental Evaluation of Fault Diagnosis from Imbalanced and Incomplete Data for Smart Semiconductor Manufacturing.
Milad SalemShayan TaheriJiann-Shiun YuanPublished in: Big Data Cogn. Comput. (2018)
Keyphrases
- incomplete data
- fault diagnosis
- semiconductor manufacturing
- missing data
- learning bayesian networks
- expert systems
- bayesian networks
- process control
- missing values
- neural network
- fault detection
- em algorithm
- fuzzy logic
- fault detection and diagnosis
- incomplete data sets
- chemical process
- production system
- bp neural network
- condition monitoring
- electronic equipment
- rotating machinery
- gas turbine
- analog circuits
- monitoring and fault diagnosis
- power transformers
- operating conditions
- multiple faults
- multi sensor information fusion
- control system
- real time
- support vector
- mathematical model
- pattern recognition
- power plant