Generative Adversarial Network-Based Fault Detection in Semiconductor Equipment with Class-Imbalanced Data.
Jeong Eun ChoiDa Hoon SeolChan Young KimSang Jeen HongPublished in: Sensors (2023)
Keyphrases
- fault detection
- class imbalanced data
- fault diagnosis
- feature selection
- generative model
- fault identification
- tennessee eastman
- industrial processes
- rotating machinery
- failure detection
- condition monitoring
- fault detection and diagnosis
- fault localization
- robust fault detection
- fault isolation
- fault detection and isolation
- power plant
- neural network
- fuzzy logic
- fuel cell
- artificial neural networks
- genetic algorithm