Carbon Dioxide Gas Sensor Based on Polyhexamethylene Biguanide Polymer Deposited on Silicon Nano-Cylinders Metasurface.
Nikolay Lvovich KazanskiyMuhammad Ali ButtSvetlana Nikolaevna KhoninaPublished in: Sensors (2021)
Keyphrases
- carbon dioxide
- electron microscopy
- si sio
- chemical vapor deposition
- data center
- electrical properties
- high density
- genetic algorithm
- gate dielectrics
- x ray
- thin film
- silicon nitride
- power plant
- climate change
- silicon dioxide
- low cost
- power generation
- high speed
- room temperature
- leakage current
- production rate
- energy saving
- remote sensing
- data streams