A simulator for local anodic oxidation of silicon surfaces.
Lado FilipovicHajdin CericJohann CervenkaSiegfried SelberherrPublished in: CCECE (2011)
Keyphrases
- three dimensional
- transmission electron microscopy
- low cost
- free form
- gallium arsenide
- high speed
- coordinate systems
- range data
- geometric features
- surface geometry
- simply connected
- silicon dioxide
- simulation model
- high density
- simulation environment
- smooth surfaces
- surface shape
- surface registration
- multiscale
- metal oxide
- real time