HCS degradation of 5 nm oxide high-voltage PLDMOS.
C. OlkStefano AresuR. RudolfM. RöhnerWolfgang GustinE. Stein Von KamienskiPublished in: Microelectron. Reliab. (2014)
Keyphrases
- high voltage
- transmission electron microscopy
- metal oxide
- leakage current
- operating conditions
- x ray
- partial discharge
- fuel cell
- normal operation
- electron microscopy
- room temperature
- solid state
- machine learning
- si sio
- intelligent systems
- low cost
- electrical properties
- fuzzy logic
- management system
- association rules
- artificial intelligence
- real time