Fault Detection of Reactive Ion Etching Using Time Series Neural Networks.
Kyung-Han RyuSong-Jae LeeJaehyun ParkDong-Chul ParkSang HongPublished in: ISNN (2) (2006)
Keyphrases
- radial basis function
- fault detection
- neural network
- fault diagnosis
- artificial neural networks
- fault identification
- industrial processes
- tennessee eastman
- fault detection and diagnosis
- condition monitoring
- rotating machinery
- fuel cell
- back propagation
- genetic algorithm
- thin film
- failure detection
- neural network model
- fault localization
- fault detection and isolation
- robust fault detection
- fuzzy logic
- pattern recognition
- gas turbine
- non stationary
- fault isolation
- multi layer
- chemical process
- artificial intelligence
- power plant
- fuzzy systems
- soft computing
- data analysis
- machine learning