Impact of fin shape variability on device performance towards 10nm node.
Kazuyuki TomidaKeizo HiragaMorin DehanGeert HellingsDoyoung JangKenichi MiyaguchiThomas ChiarellaMinsoo KimAnda MocutaNaoto HoriguchiAbdelkarim MerchaDiederik VerkestAaron TheanPublished in: ICICDT (2015)