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Kazuyuki Tomida
Publication Activity (10 Years)
Years Active: 2015-2015
Publications (10 Years): 1
Top Topics
Metal Oxide Semiconductor
Shape Variability
X Ray
Top Venues
ICICDT
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Publications
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Kazuyuki Tomida
,
Keizo Hiraga
,
Morin Dehan
,
Geert Hellings
,
Doyoung Jang
,
Kenichi Miyaguchi
,
Thomas Chiarella
,
Minsoo Kim
,
Anda Mocuta
,
Naoto Horiguchi
,
Abdelkarim Mercha
,
Diederik Verkest
,
Aaron Thean
Impact of fin shape variability on device performance towards 10nm node.
ICICDT
(2015)