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Oxygen-plasma-based digital etching for GaN/AlGaN high electron mobility transistors.

Jingyi WuHongyu YuYang JiangZeyu WanSiqi LeiWei-Chih ChengGuangnan ZhouRobert SokolovskijQing WangGuangrui Maggie Xia
Published in: ASICON (2019)
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