Investigation of the surface silica layer on porous poly-Si thin films.

Hei Wong P. G. Han M. C. Poon Y. Gao

Published in: Microelectron. Reliab. (2001)

Keyphrases

thin film
solar cell
multi layer
silicon nitride
silicon dioxide
film thickness
chemical vapor deposition
white light interferometry
si sio
plasma etching
high density
grain size
short circuit
three dimensional
room temperature
metal oxide
chance discovery
d objects
spatial distribution
surface reconstruction