Enhanced NO Gas Performance of (002)-Oriented Zinc Oxide Nanostructure Thin Films.
FitrianaNi Luh Wulan SeptianiDamar Rastri AdhikaAdhitya Gandaryus Saputro NugrahaBrian YuliartoPublished in: IEEE Access (2019)
Keyphrases
- thin film
- room temperature
- silicon nitride
- electron microscopy
- electrical properties
- short circuit
- film thickness
- high density
- grain size
- genetic algorithm
- solar cell
- multi layer
- chemical vapor deposition
- white light interferometry
- silicon dioxide
- databases
- low cost
- transmission electron microscopy
- artificial neural networks
- plasma etching