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Co-dot-array formation along scratches on Si(111) surface by electroless deposition.
Changman Kim
Yasushi Oikawa
Jaesoo Shin
Hajime Ozaki
Published in:
Microelectron. J. (2003)
Keyphrases
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si sio
chemical vapor deposition
three dimensional
thin film
object surface
plasma etching
surface reconstruction
multi view
range data
surface model
surface features
neural network
curved surfaces
surface fitting
database replication
d objects
leakage current