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Automated Semiconductor Defect Inspection in Scanning Electron Microscope Images: a Systematic Review.
Thibault Lechien
Enrique Dehaerne
Bappaditya Dey
Víctor Blanco
Sandip Halder
Stefan De Gendt
Published in:
CoRR (2023)
Keyphrases
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microscope images
systematic review
defect detection
cross sections
empirical studies
automatic segmentation
cross sectional
cell nuclei
automated analysis
image processing
scale invariant
computer aided
electron microscopy
electron beam
semi automatic
gray scale
three dimensional