CMOS Compatible Hydrogen Sensor Using Platinum Gate and ALD-Aluminum Oxide.
Adham ElshaerSerge EcoffeyAbdelatif JaouadStéphane MonfrayDominique DrouinPublished in: Sensors (2024)
Keyphrases
- metal oxide semiconductor
- gate insulator
- silicon nitride
- gate dielectrics
- electrical properties
- image sensor
- silicon dioxide
- leakage current
- si sio
- field effect transistors
- steady state
- cmos technology
- low voltage
- low cost
- cmos image sensor
- sensor networks
- thin film
- sensor data
- low power
- dynamic range
- integrated circuit
- video camera
- nm technology
- circuit design
- focal plane
- power consumption
- image processing algorithms
- multi sensor
- sensor fusion
- real time
- analog to digital converter
- parallel processing
- hardware and software
- vlsi circuits
- electron microscopy
- chemical vapor deposition
- fuel cell
- data acquisition
- room temperature