films deposited by ALD.

Jibin Fan Hongxia Liu Qianwei Kuang Bo Gao Fei Ma Yue Hao

Published in: Microelectron. Reliab. (2012)

Keyphrases

permalloy films
electrical properties
chemical vapor deposition
rf sputtering
film thickness
silicon nitride
thin film
magnetic field
transmission line
silicon dioxide
high density
room temperature
leakage current
grain size
multi view
database
electron microscopy
image sequences
computer vision
machine learning