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films deposited by ALD.
Jibin Fan
Hongxia Liu
Qianwei Kuang
Bo Gao
Fei Ma
Yue Hao
Published in:
Microelectron. Reliab. (2012)
Keyphrases
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permalloy films
electrical properties
chemical vapor deposition
rf sputtering
film thickness
silicon nitride
thin film
magnetic field
transmission line
silicon dioxide
high density
room temperature
leakage current
grain size
multi view
database
electron microscopy
image sequences
computer vision
machine learning