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Experimental Investigation of the Dielectric Constants of Thin Noble Metallic Films Using a Surface Plasmon Resonance Sensor.
Longbiao Tao
Shuo Deng
Hongyun Gao
Haifei Lv
Xiaoyan Wen
Min Li
Published in:
Sensors (2020)
Keyphrases
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silicon dioxide
chemical vapor deposition
electrical properties
film thickness
sensor data
high temperature
three dimensional
real time
sensor networks
d objects
laser scanner
thin film
high density
leakage current
sensor fusion
space charge
film restoration
silicon nitride
gate insulator