Physical-Vapor-Deposited Metal Oxide Thin Films for pH Sensing Applications: Last Decade of Research Progress.
Mohammad Nur-E.-AlamDevendra Kumar MauryaYap Boon KarArmin RajabiCamellia DoroodyHassan Bin MohamedMayeen Uddin KhandakerMohammad Aminul IslamSieh Kiong TiongPublished in: Sensors (2023)
Keyphrases
- thin film
- metal oxide
- electron microscopy
- chemical vapor deposition
- silicon nitride
- film thickness
- x ray
- solid state
- high density
- grain size
- high speed
- multi layer
- short circuit
- electrical properties
- silicon dioxide
- white light interferometry
- room temperature
- solar cell
- sensor networks
- real time
- plasma etching
- database
- image sensor
- artificial neural networks