Thermal-sensitive BST thin film capacitors for dielectric bolometer prepared by RF magnetron sputtering.
Shi-Jian LiuXiang-Bin ZengJun-Hao ChuPublished in: Microelectron. J. (2004)
Keyphrases
- film thickness
- electrical properties
- thin film
- chemical vapor deposition
- short circuit
- high density
- room temperature
- magnetic field
- white light interferometry
- solar cell
- radio frequency
- grain size
- infrared
- power plant
- integrated circuit
- multi layer
- data mining
- rf sputtering
- silicon nitride
- database
- electron microscopy
- high temperature
- single image
- relevance feedback
- neural network
- plasma etching
- databases