Fabrication of metal nanoparticles as catalyst at low temperature and growth of silicon nanostructures.
Minsung JeonYoshihiro TomitsukaKazuya MaishigiHisashi UchiyamaMinoru AoyagiKoichi KamisakoPublished in: IEICE Electron. Express (2008)
Keyphrases
- high density
- field effect transistors
- chemical vapor deposition
- transmission electron microscopy
- semiconductor devices
- plasma etching
- high speed
- thin film
- thin film transistor
- x ray
- boundary conditions
- low density
- silicon on insulator
- steady state
- growth rate
- grain size
- low cost
- multiscale
- electron beam
- liquid crystal
- mathematical analysis
- integrated circuit
- information retrieval
- high temperature
- magnetic recording
- electrical properties
- data center
- website
- information systems