Karla Hiller

Publication Activity (10 Years)

Years Active: 2003-2022
Publications (10 Years): 5

Top Topics

Software Reliability

Silicon Nitride

Top Venues

Microelectron. Reliab.

Publications

Kuan-Ting Ho, Daniel Monteiro Diniz Reis, Karla Hiller
Defect-controlled Resistance Degradation of Sputtered Lead Zirconate Titanate Thin Films. IRPS (2022)
Katja Meinel, Marcel Melzer, Chris Stoeckel, Alexey Shaporin, Roman Forke, Sven Zimmermann, Karla Hiller, Thomas Otto, Harald Kuhn
2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride. Sensors 20 (22) (2020)
Zhi Li, Sai Gao, Uwe Brand, Karla Hiller, Susann Hahn, Gerry Hamdana, Erwin Peiner, Helmut Wolff, Detlef Bergmann
Nanomechanical Characterization of Vertical Nanopillars Using an MEMS-SPM Nano-Bending Testing Platform. Sensors 19 (20) (2019)
Katja Meinel, Chris Stoeckel, Marcel Melzer, Sven Zimmermann, Roman Forke, Karla Hiller, Thomas Otto
Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride. IEEE SENSORS (2019)
Daniel Monteiro Diniz Reis, Sven Rzepka, Karla Hiller
Reliability testing of integrated low-temperature PVD PZT films. Microelectron. Reliab. (2018)
Thomas Gessner, Andreas Bertz, Christian Lohmann, Steffen Kurth, Karla Hiller
Advanced Silicon Micromachining. Int. J. Comput. Eng. Sci. 4 (2) (2003)