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Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride.
Katja Meinel
Chris Stoeckel
Marcel Melzer
Sven Zimmermann
Roman Forke
Karla Hiller
Thomas Otto
Published in:
IEEE SENSORS (2019)
Keyphrases
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thin film
high density
solar cell
sensor data
multi layer
sensor networks
short circuit
grain size
high voltage
multi sensor
structured light
electron microscopy
room temperature
chemical vapor deposition
databases
cost effective
data fusion
single image
silicon nitride
white light interferometry