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Marcel Melzer
ORCID
Publication Activity (10 Years)
Years Active: 2018-2020
Publications (10 Years): 3
Top Topics
Silicon Nitride
Solar Cell
Chemical Vapor Deposition
Thin Film
Top Venues
IEEE SENSORS
Sensors
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Publications
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Katja Meinel
,
Marcel Melzer
,
Chris Stoeckel
,
Alexey Shaporin
,
Roman Forke
,
Sven Zimmermann
,
Karla Hiller
,
Thomas Otto
,
Harald Kuhn
2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride.
Sensors
20 (22) (2020)
Katja Meinel
,
Chris Stoeckel
,
Marcel Melzer
,
Sven Zimmermann
,
Roman Forke
,
Karla Hiller
,
Thomas Otto
Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride.
IEEE SENSORS
(2019)
Chris Stoeckel
,
Katja Meinel
,
Marcel Melzer
,
Thomas Otto
Thin Film Piezoelectric Aluminum Nitride for Piezoelectric Micromachined Ultrasonic Transducers.
IEEE SENSORS
(2018)