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2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride.

Katja MeinelMarcel MelzerChris StoeckelAlexey ShaporinRoman ForkeSven ZimmermannKarla HillerThomas OttoHarald Kuhn
Published in: Sensors (2020)
Keyphrases
  • thin film
  • high density
  • short circuit
  • multi layer
  • real time
  • electron microscopy
  • sensor data
  • databases
  • grain size
  • solar cell
  • neural network
  • database systems
  • multi sensor
  • room temperature
  • silicon nitride