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Alexey Shaporin
ORCID
Publication Activity (10 Years)
Years Active: 2020-2020
Publications (10 Years): 1
Top Topics
Grain Size
Thin Film
Database Systems
Solar Cell
Top Venues
Sensors
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Publications
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Katja Meinel
,
Marcel Melzer
,
Chris Stoeckel
,
Alexey Shaporin
,
Roman Forke
,
Sven Zimmermann
,
Karla Hiller
,
Thomas Otto
,
Harald Kuhn
2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride.
Sensors
20 (22) (2020)