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Thin Film Piezoelectric Aluminum Nitride for Piezoelectric Micromachined Ultrasonic Transducers.

Chris StoeckelKatja MeinelMarcel MelzerThomas Otto
Published in: IEEE SENSORS (2018)
Keyphrases
  • thin film
  • high voltage
  • high density
  • grain size
  • short circuit
  • solar cell
  • multi layer
  • electron microscopy
  • room temperature
  • finite automata
  • silicon nitride
  • database
  • machine learning
  • data management
  • x ray