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D. Tiernc
Publication Activity (10 Years)
Years Active: 2024-2024
Publications (10 Years): 1
Top Topics
Line Drawings
Word Meaning
Keywords
Reliability Analysis
Top Venues
IRPS
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Publications
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D. Tiernc
,
Antonio Arreghini
,
Alicja Lesniewska
,
Y. Jeong
,
Marleen H. van der Veen
,
J. Stiers
,
N. Bazzazian
,
Ivan Ciofi
,
Geert Van den Bosch
,
Maarten Rosmeulen
Exploring the Reliability Limits for the Z-Pitch Scaling of Molybdenum Inter-Word Line Oxides in 3D NAND.
IRPS
(2024)