Exploring the Reliability Limits for the Z-Pitch Scaling of Molybdenum Inter-Word Line Oxides in 3D NAND.
D. TierncAntonio ArreghiniAlicja LesniewskaY. JeongMarleen H. van der VeenJ. StiersN. BazzazianIvan CiofiGeert Van den BoschMaarten RosmeulenPublished in: IRPS (2024)