Enabling Active Backside Technology for ESD and LU Reliability in DTCO/STCO.
K. SerbulovaS.-H. ChenGeert HellingsAnabela VelosoAnne JourdainDimitri LintenJ. De BoeckGuido GroesenekenJulien RyckaertGert Van der PlasEric BeyneEugenio Dentoni LittaNaoto HoriguchiPublished in: VLSI Technology and Circuits (2022)