New Internal Stress Driven on-Chip Micromachines for Extracting Mechanical Properties of Thin Films

D. Fabrègue Nicolas André T. Pardoen Jean-Pierre Raskin

Published in: CoRR (2007)

Keyphrases

thin film
mechanical properties
high density
stress distribution
composite materials
short circuit
finite element model
grain size
low cost
stainless steel
chemical vapor deposition
low density
room temperature
plasma etching
high temperature
high speed
material properties
multi layer
data center
experimental data