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D. Fabrègue
Publication Activity (10 Years)
Years Active: 2007-2007
Publications (10 Years): 0
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Publications
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D. Fabrègue
,
Nicolas André
,
T. Pardoen
,
Jean-Pierre Raskin
New Internal Stress Driven on-Chip Micromachines for Extracting Mechanical Properties of Thin Films
CoRR
(2007)