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Nanochannels on silicon oxide surface fabricated by atomic force microscopy.
Zhiqian Wang
Steve Tung
Niandong Jiao
Zaili Dong
Published in:
NEMS (2010)
Keyphrases
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si sio
silicon dioxide
atomic force microscopy
metal oxide
high speed
leakage current
high temperature
space charge
transmission electron microscopy
silicon nitride
video sequences
d objects
x ray
solid state