Effects of gamma-ray irradiation on polycrystalline silicon thin-film transistors.
N. A. HastasC. A. DimitriadisJ. BriniG. KamarinosV. K. GueorguievS. KaschievaPublished in: Microelectron. Reliab. (2003)
Keyphrases
- thin film
- high density
- field effect transistors
- solar cell
- low density
- plasma etching
- grain size
- short circuit
- chemical vapor deposition
- electron microscopy
- data center
- room temperature
- silicon nitride
- space charge
- electron beam
- integrated circuit
- semiconductor devices
- power consumption
- cost effective
- decision making
- databases