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Mechanical durability of micro-nano structures surface of black silicon produced by femtosecond laser.
X. B. Guo
Jian-Ning Ding
S. Y. Wang
J. H. Qiu
Bao Kan
Ning-Yi Yuan
Published in:
NEMS (2013)
Keyphrases
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silicon dioxide
laser beam
three dimensional
si sio
low cost
surface reconstruction
geometric features
free form
laser scanner
mechanical properties
mechanical design
space charge
nano scale
viewpoint
d objects
gallium arsenide
elastic properties
laser radar
surface features
range sensors
smooth surfaces