An Ensembled Anomaly Detector for Wafer Fault Detection.
Giuseppe FurnariFrancesco VattiatoDario AllegraFilippo Luigi Maria MilottaAlessandro OrofinoRosetta RizzoRosaria Angela De PaloFilippo StancoPublished in: Sensors (2021)
Keyphrases
- fault detection
- fault diagnosis
- industrial processes
- anomaly detection
- fault identification
- tennessee eastman
- intrusion detection
- semiconductor manufacturing
- condition monitoring
- rotating machinery
- fault localization
- fault detection and diagnosis
- fuel cell
- failure detection
- robust fault detection
- integrated circuit
- fault isolation
- power plant
- fault detection and isolation
- decision making
- data mining
- real time