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Effects of hydrogenation on the performance and stability of p-channel polycrystalline silicon thin-film transistors.
N. A. Hastas
C. A. Dimitriadis
F. V. Farmakis
G. Kamarinos
Published in:
Microelectron. Reliab. (2003)
Keyphrases
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thin film
high density
field effect transistors
low density
plasma etching
semiconductor devices
solar cell
grain size
short circuit
electron microscopy
chemical vapor deposition
room temperature
white light interferometry
neural network
gate dielectrics
genetic algorithm
steady state
control system