Thin nanocrystalline diamond films deposited by LaPlas-CVD at atmospheric pressure.
Frank VollertsenKnut PartesAlexej SchubnovPublished in: Prod. Eng. (2010)
Keyphrases
- electrical properties
- permalloy films
- chemical vapor deposition
- film thickness
- rf sputtering
- silicon nitride
- thin film
- high density
- magnetic field
- transmission line
- data sets
- grain size
- air quality
- multiscale
- machine learning
- artificial intelligence
- case study
- refractive index
- electron microscopy
- data structure
- real time
- distributed systems
- high pressure
- video sequences
- film restoration
- silicon dioxide
- electron micrographs
- multiresolution
- databases
- statistical analysis