Chromatic and spherical aberration correction for silicon aplanatic solid immersion lens for fault isolation and photon emission microscopy of integrated circuits.
Bennett B. GoldbergA. YurtYang LuE. RamsayF. H. KöklüJ. MertzT. G. BifanoM. S. ÜnlüPublished in: Microelectron. Reliab. (2011)
Keyphrases
- integrated circuit
- fault isolation
- error detection
- wide angle
- error correction
- metal oxide semiconductor
- three dimensional
- error recovery
- transmission electron microscopy
- diagnostic tests
- fault detection
- fault tolerant
- fault tolerance
- image analysis
- physical systems
- fault diagnosis
- code generation
- low cost
- printed circuit boards
- fault localization
- x ray
- high resolution
- expert systems
- application development
- case study