Model Predictive Control for Electron Beam Stabilization in a Synchrotron.
Idris KempfPaul J. GoulartStephen R. DuncanPublished in: CoRR (2021)
Keyphrases
- electron beam
- model predictive control
- x ray
- control system
- predictive control
- integrated circuit
- semiconductor devices
- design parameters
- national laboratory
- light source
- three dimensional
- electron beam lithography
- control strategy
- search algorithm
- control algorithm
- input output
- computational intelligence
- fuzzy logic
- artificial neural networks
- case study
- artificial intelligence