Cell Library Development Methodology for Throughput Enhancement of Electron Beam Direct-Write Lithography Systems.
Makoto SugiharaTaiga TakataKenta NakamuraRyoichi InanamiHiroaki HayashiKatsumi KishimotoTetsuya HasebeYukihiro KawanoYusuke MatsunagaKazuaki J. MurakamiKatsuya OkumuraPublished in: SoC (2005)