Katsuya Okumura

Publication Activity (10 Years)

Years Active: 2002-2006
Publications (10 Years): 0

Publications

Makoto Sugihara, Taiga Takata, Kenta Nakamura, Ryoichi Inanami, Hiroaki Hayashi, Katsumi Kishimoto, Tetsuya Hasebe, Yukihiro Kawano, Yusuke Matsunaga, Kazuaki J. Murakami, Katsuya Okumura
A character size optimization technique for throughput enhancement of character projection lithography. ISCAS (2006)
Makoto Sugihara, Taiga Takata, Kenta Nakamura, Ryoichi Inanami, Hiroaki Hayashi, Katsumi Kishimoto, Tetsuya Hasebe, Yukihiro Kawano, Yusuke Matsunaga, Kazuaki J. Murakami, Katsuya Okumura
Cell Library Development Methodology for Throughput Enhancement of Character Projection Equipment. IEICE Trans. Electron. (3) (2006)
Makoto Sugihara, Taiga Takata, Kenta Nakamura, Ryoichi Inanami, Hiroaki Hayashi, Katsumi Kishimoto, Tetsuya Hasebe, Yukihiro Kawano, Yusuke Matsunaga, Kazuaki J. Murakami, Katsuya Okumura
Cell Library Development Methodology for Throughput Enhancement of Electron Beam Direct-Write Lithography Systems. SoC (2005)
Kenichi Kataoka, Toshihiro Itoh, Katsuya Okumura, Tadatomo Suga
Low-Contact-Force Probing on Copper Electrodes. ITC (2002)