A character size optimization technique for throughput enhancement of character projection lithography.
Makoto SugiharaTaiga TakataKenta NakamuraRyoichi InanamiHiroaki HayashiKatsumi KishimotoTetsuya HasebeYukihiro KawanoYusuke MatsunagaKazuaki J. MurakamiKatsuya OkumuraPublished in: ISCAS (2006)