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Fabrication of highly ordered anodic aluminium oxide templates on silicon substrates.
Aijun J. Yin
Marian B. Tzolov
David A. Cardimona
L. Guo
Jimmy Xu
Published in:
IET Circuits Devices Syst. (2007)
Keyphrases
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high density
field effect transistors
room temperature
thin film
low density
electrical properties
silicon dioxide
semiconductor devices
high speed
plasma etching
magnetic recording
si sio
silicon nitride
transmission electron microscopy
electron microscopy
data center
learning algorithm
user defined