The effect of gate overlap on the device degradation in IGZO thin film transistors.

Dae Hyun Kim Jong Tae Park

Published in: Microelectron. Reliab. (2014)

Keyphrases

thin film
high density
field effect transistors
short circuit
low density
metal oxide semiconductor
steady state
electron microscopy
data center
multi layer
grain size
liquid crystal displays
solar cell
chemical vapor deposition
plasma etching
genetic algorithm
power consumption
query processing
data analysis