Scanning probe microscopy based electrical characterization of thin dielectric and organic semiconductor films.
Alexander HoferRoland BibergerGünther BenstetterBjörn WilkeHolger GöbelPublished in: Microelectron. Reliab. (2013)
Keyphrases
- electrical properties
- silicon dioxide
- image analysis
- silicon nitride
- gate dielectrics
- transmission line
- chemical vapor deposition
- film thickness
- high temperature
- image enhancement
- high throughput
- short circuit
- space charge
- scan data
- structured light
- fluorescence microscopy
- semiconductor manufacturing
- plasma etching
- light emitting diodes
- neural network
- engineering and computer science
- electron microscopy
- image stacks
- differential equations
- permalloy films
- image processing