deposited with metal-organic precursor TBTDET.

L. Pinzelli M. Gros-Jean Y. Bréchet F. Volpi A. Bajolet J.-C. Giraudin

Published in: Microelectron. Reliab. (2007)

Keyphrases

chemical vapor deposition
silicon nitride
thin film
high density
electron microscopy
electrical properties
light emitting diodes
high temperature
silicon dioxide
grain size
knowledge repository
databases
data mining
learning environment
artificial neural networks