Lateral NWFET optimization for beyond 7nm nodes.
Dmitry YakimetsDoyoung JangPraveen RaghavanGeert EnemanHans MertensP. SchuddinckArindam MallikMarie Garcia BardonNadine CollaertAbdelkarim MerchaDiederik VerkestAaron TheanKristin De MeyerPublished in: ICICDT (2015)