Reliability and failure in single crystal silicon MEMS devices.
Antonia NeelsA. DommannA. SchifferleO. PapesEdoardo MazzaPublished in: Microelectron. Reliab. (2008)
Keyphrases
- failure rate
- highly reliable
- semiconductor devices
- mobile devices
- low cost
- reliability analysis
- high speed
- root cause
- transmission electron microscopy
- reliability assessment
- high density
- embedded devices
- handheld devices
- intelligent environments
- plasma etching
- failure prediction
- real time
- personal computer
- ambient intelligence
- wireless networks
- high resolution
- three dimensional
- data sets