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A. Schifferle
Publication Activity (10 Years)
Years Active: 2008-2008
Publications (10 Years): 0
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Publications
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Antonia Neels
,
A. Dommann
,
A. Schifferle
,
O. Papes
,
Edoardo Mazza
Reliability and failure in single crystal silicon MEMS devices.
Microelectron. Reliab.
48 (8-9) (2008)