Bottom-up fabrication of special parylene films based on selective growth on Au-coated surface.
Yi ZhouFei DingChao NiWei WangWengang WuPublished in: NEMS (2009)
Keyphrases
- electrical properties
- film thickness
- d objects
- three dimensional
- data driven
- surface reconstruction
- space charge
- growth rate
- integrated circuit
- silicon dioxide
- chemical vapor deposition
- surface fitting
- cross section
- facial expression recognition
- normal vectors
- electron beam
- surface points
- room temperature
- surface shape
- object surface
- reconstruction method
- high density