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Gallium Oxide Films Prepared by Oxidation of Gallium in Oxygen-Hydrogen Plasma.
Leonid Mochalov
Alexander Logunov
Tatyana Sazanova
Daniela Gogova
Sergey Zelentsov
Pavel Yunin
Igor Prokhorov
Vladimir Malyshev
Vladimir Vorotyntsev
Published in:
ICTON (2020)
Keyphrases
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thin film
chemical vapor deposition
electron microscopy
room temperature
silicon nitride
high density
metal oxide
grain size
multi layer
plasma etching
database
x ray
film thickness
databases
artificial neural networks
fuel cell
transmission electron microscopy